JST manufacturing

PROCESSES

Removal of light organics, silicon dioxide layer, particles, metals; protective oxide regrowth.

STEP 1: HF (50:1) – PVDF or Natural Polypro Ambient Static Bath

STEP 2: Rinse – PVDF QDR Bath

STEP 3: SC1 – Quartz Heated Filtered BathOptional Megasonics

STEP 4: Rinse – PVDF QDR Bath

STEP 5: SC2 – Quartz Heated Filtered Bath

STEP 6: Rinse – PVDF QDR Bath

STEP 7: Dry – IPA Vapor Dryer

Etch Silicon Nitride Layer.

STEP 1: HF (50:1) – PVDF or Natural Polypro Ambient Static Bath

STEP 2: Rinse – PVDF QDR Bath

STEP 3: Phosphoric Acid – Quartz Nitride Etch

STEP 4: Rinse – PVDF QDR Bath

STEP 5: SC1 – Quartz Heated Filtered BathOptional Megasonics

STEP 6: Rinse – PVDF QDR Bath

STEP 7: Dry – IPA Vapor Dryer

Removal of light organics, silicon dioxide layer, and metals.

STEP 1: HF (50:1) – PVDF or Natural Polypro Ambient Static Bath

STEP 2: Rinse – PVDF QDR Bath

STEP 3: SC2 – Quartz Heated Filtered Bath

STEP 4: Rinse – PVDF QDR Bath

STEP 5: Dry –IPA Vapor Dryer

Removal of light organics, particles, and silicon dioxide layer.

STEP 1: SC1 – Quartz Heated Filtered BathOptional Megasonics

STEP 2: Rinse – PVDF QDR Bath

STEP 3: HF (50:1) – PVDF or Natural Polypro Ambient Static Bath

STEP 4: Rinse – PVDF QDR Bath

STEP 5: Dry – IPA Vapor Dryer

Silicon etch, Polysilicon etch, Silicon Dioxide removal.

STEP 1: HF – PVDF Constant Temperature Bath

STEP 2: Rinse – PVDF QDR Bath

STEP 3: BOE – PVDF Constant Temperature Bath

STEP 4: Rinse – PVDF QDR Bath

STEP 5: Dry – IPA Vapor Dryer

Positive Photoresist removal without etching silicon, silicon dioxide, silicon nitride or SOI for nonmetal applications.

STEP 1: SPM (a.k.a. Piranha or Caro’s Acid) – Quartz Static Heated Bath

STEP 2: Rinse – PVDF QDR Bath

STEP 3: SPM (a.k.a. Piranha or Caro’s Acid) – Quartz Static Heated Bath

STEP 4: Rinse – PVDF QDR Bath

STEP 5: Dry – IPA Vapor Dryer

Negative removal of photoresist, metal.

STEP 1: NMP – Stainless Steel Heated Downflow Bath

STEP 2: NMP – Stainless Steel Ultrasonic Bath

STEP 3: Acetone – Stainless Steel Ambient Filtration Bath

STEP 4: IPA – Stainless Steel Ambient Filtration Bath

STEP 5: Dry – IPA Vapor Dryer

Bulk Silicon Etch.

STEP 1: Sulfuric – Quartz Static Heated Bath

STEP 2: Rinse – PVDF QDR Bath

STEP 3: KOH – Quartz Heated Filtered Bath

STEP 4: Rinse – PVDF QDR Bath

STEP 5: Dry – IPA Vapor Dryer

OUR PRODUCTS

JST Manufacturing Inc.
219 E. 50th S.
Boise, ID  83714  USA

Toll Free: 800-872-0391
Phone: 208-377-1120
Fax: 208-377-3645
e-mail: info@jstmfg.com

© 2017 JST Manufacturing© 2017, JST Manufacturing Inc.. All rights reserved.