
PROCESSES
Removal of light organics, silicon dioxide layer, particles, metals; protective oxide regrowth.
STEP 1: HF (50:1) - PVDF or Natural Polypro Ambient Static Bath
STEP 2: Rinse - PVDF QDR Bath
STEP 3: SC1 - Quartz Heated Filtered Bath / Optional Megasonics
STEP 4: Rinse - PVDF QDR Bath
STEP 5: SC2 - Quartz Heated Filtered Bath
STEP 6: Rinse - PVDF QDR Bath
STEP 7: Dry - IPA Vapor Dryer
Etch Silicon Nitride Layer.
STEP 1: HF (50:1) - PVDF or Natural Polypro Ambient Static Bath
STEP 2: Rinse - PVDF QDR Bath
STEP 3: Phosphoric Acid - Quartz Nitride Etch
STEP 4: Rinse - PVDF QDR Bath
STEP 5: SC1 - Quartz Heated Filtered Bath / Optional Megasonics
STEP 6: Rinse - PVDF QDR Bath
STEP 7: Dry - IPA Vapor Dryer
Removal of light organics, silicon dioxide layer, and metals.
STEP 1: HF (50:1) - PVDF or Natural Polypro Ambient Static Bath
STEP 2: Rinse - PVDF QDR Bath
STEP 3: SC2 - Quartz Heated Filtered Bath
STEP 4: Rinse - PVDF QDR Bath
STEP 5: Dry -IPA Vapor Dryer
Removal of light organics, particles, and silicon dioxide layer.
STEP 1: SC1 - Quartz Heated Filtered Bath / Optional Megasonics
STEP 2: Rinse - PVDF QDR Bath
STEP 3: HF (50:1) - PVDF or Natural Polypro Ambient Static Bath
STEP 4: Rinse - PVDF QDR Bath
STEP 5: Dry - IPA Vapor Dryer
Silicon etch, Polysilicon etch, Silicon Dioxide removal.
STEP 1: HF - PVDF Constant Temperature Bath
STEP 2: Rinse - PVDF QDR Bath
STEP 3: BOE - PVDF Constant Temperature Bath
STEP 4: Rinse - PVDF QDR Bath
STEP 5: Dry - IPA Vapor Dryer
Positive Photoresist removal without etching silicon, silicon dioxide, silicon nitride or SOI for nonmetal applications.
STEP 1: SPM (a.k.a. Piranha or Caro's Acid) - Quartz Static Heated Bath
STEP 2: Rinse - PVDF QDR Bath
STEP 3: SPM (a.k.a. Piranha or Caro's Acid) - Quartz Static Heated Bath
STEP 4: Rinse - PVDF QDR Bath
STEP 5: Dry - IPA Vapor Dryer
Negative removal of photoresist, metal.
STEP 1: NMP - Stainless Steel Heated Downflow Bath
STEP 2: NMP - Stainless Steel Ultrasonic Bath
STEP 3: Acetone - Stainless Steel Ambient Filtration Bath
STEP 4: IPA - Stainless Steel Ambient Filtration Bath
STEP 5: Dry - IPA Vapor Dryer
Bulk Silicon Etch.
STEP 1: Sulfuric - Quartz Static Heated Bath
STEP 2: Rinse - PVDF QDR Bath
STEP 3: KOH - Quartz Heated Filtered Bath
STEP 4: Rinse - PVDF QDR Bath
STEP 5: Dry - IPA Vapor Dryer
OUR PRODUCTS
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