Heated Filtered Bath
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JST’s Heated Filtered Bath improves chemical life and provides efficient particulate removal by continuously filtering the process chemicals. The chemical enters the bath from the bottom, flows uniformly across the substrates, and then cascades over a four sided serrated weir. The heating elements are bonded to the outer walls, insulated and contained within an outer shroud that is N2 purged. Inline heaters are available for large, high temperature baths that require a fast heat up time or higher processing temperatures.
Standard Features
- Material Options: Natural Polypropylene, PVDF, PFA, Quartz or 316L Stainless Steel
- PLC controlled with color touchscreen
- Programmable temperature, recirculation flow rate, and process time
- Full liquid level detection
- Sloped bottom to drain
- Temperature Range 40º C- 180º C /- 1º. Thermocouple, type J Temperature probe
- Standard 10” inline filter housing
- Coved corners to eliminate particle traps
- 4 sided serrated overflow weir
- Drain Screens
- Pneumatic Bellows Recirculation Pump
- Air Operated Valves
- Dispersion cassette platform
- Customizable to fit product

Optional Features
- Ultrasonic Agitation
- Condensing Cooling Coils
- Mechanical agitation
- Automated or manual lid
- Dedicated Drain to carboy
- Flow sensor
- Electric centrifugal pump
- Pump Stroke monitoring
- Auto chemical fill and blending
- DIW Drip to maintain chemical concentration
- Installation into JST’s Manual or Automated Wet Benches
- Customizable product racks, fixtures, or Process Cassettes

Applications
- Piranha / Sulfuric Peroxide Resist Stripping
- Solvent Photoresist stripping
- Nitride Etch
- Metal Etch
- KOH / TMAH Silicon Etching
- SC1 Clean
- SC2 Clean
- Mixed Acid Etch
