Vertical Quartz Diffusion Tube Cleaner Wet Bench

Designed for cleaning of diffusion oven quartz tubes, cassettes, and miscellaneous parts.  JST offers a wet bench for cleaning quartz ware using chemical spray in an ultra-clean environment.  The Vertical Quartz Diffusion Tube Cleaners are engineered with an efficient full coverage spray to provide uniform cleaning while minimizing chemical usage. The self-monitoring chemical workstation provides accurate process control. As with all JST wet benches, they are designed for ease of maintenance activities and come with our standard 24/7 Technical Support.

Standard Features

  • Material Options: FM Approved PVC-C or White Polypropylene with PVDF spray cleaning chamber
  • Internal stainless steel frames isolated from process chemistry
  • Independent tube, paddle, and miscellaneous part processing fixtures
  • Designed with a programmable logic controller (PLC) in addition to a color touchscreen that control the entire wet bench
  • Ergonomically designed front load/unload access for products
  • Semi-automated operation platform
  • Front, side, or rear removable panels for easy maintenance access
  • Perforated chamber bottom design pulls chemical fumes through the exhausted dual containment plenum
  • Auto-locking process chamber doors
  • Efficient full coverage spray provides for uniform cleaning while minimizing chemical usage
  • Purged chemical spray manifold for operator safety
  • Automated chemical handling using an on-board chemical storage reservoir
  • Integrated recirculation and filtration of process chemistries
Vertical-Quartz-Diffusion-Tube-Cleaner-(2)

Optional Features 

  • Dual process chamber configuration
  • Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
  • Custom part fixtures
  • Additional on-board chemical storage reservoirs
  • External Chemical Dispense Cart fill and Chemical Waste Pump Cart
  • Bulk chemical fill interface
  • On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage.
  • GEM/SECSII Factory Automation Interface
  • Ergonomically mounted 23” Color Touchscreen Monitor with  JST’s GENII Software
  • Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
  • Nitrogen and DI Water Hand Spray Guns
  • Additional facility drain options
  • SEMI S2 Certification
  • CE Marking
  • 3rd Party Electrical Inspections
Vertical-Quartz-Diffusion-Tube-Cleaner-(3)