Vertical Quartz Diffusion Tube Cleaner
Vertical Quartz Diffusion Tube Cleaner
The semi-automated Vertical Quartz Diffusion Tube Cleaners are engineered with an efficient full-coverage spray to provide uniform cleaning while minimizing chemical usage.
- Material Options: FM-approved PVC-C or white polypropylene with PVDF spray cleaning chamber
- Internal stainless-steel frames isolated from process chemistry
- Independent tube, paddle, and miscellaneous part processing fixtures
- Designed with a programmable logic controller (PLC) in addition to a color touchscreen that control the entire wet bench
- Ergonomically designed front load/unload access for products
- Semi-automated operation platform
- Front, side, or rear removable panels for easy maintenance access
- Perforated chamber bottom design pulls chemical fumes through the exhausted dual containment plenum
- Auto-locking process chamber doors
- Efficient full coverage spray provides for uniform cleaning while minimizing chemical usage
- Purged chemical spray manifold for operator safety
- Automated chemical handling using an on-board chemical storage reservoir
- Integrated recirculation and filtration of process chemistries
- Dual process chamber configuration
- Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
- Custom part fixtures
- Additional on-board chemical storage reservoirs
- External Chemical Dispense Cart fill and Chemical Waste Pump Cart
- Bulk chemical fill interface
- On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage
- GEM/SECSII factory automation interface
- Ergonomically mounted 23″ color touchscreen monitor with JST’s GENII software
- Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
- Nitrogen and DI water hand spray guns
- Additional facility drain options
- SEMI S2 certification
- CE marking
- 3rd party electrical inspections
Vertical Quartz Diffusion Tube Cleaner Overview
Designed to clean diffusion-oven quartz tubes, cassettes, and miscellaneous parts, JST’s Vertical Quartz Diffusion Tube Cleaner offers a safe, reliable platform for handling quartz-ware using chemical spray in an ultra-clean environment.
The semi-automated quartz cleaners are engineered with an efficient full-coverage spray to provide uniform cleaning while minimizing chemical usage. This self-monitoring chemical workstation provides accurate process control while ergonomic front load/unload access supports lab technicians as they maneuver parts during the cleaning process. The vertical quartz tube cleaner features integrated re-circulation and filtration of process chemistries and purged chemical spray manifold for operator safety. Optional features for this system include bulk chemical fill interface, additional chemical storage reservoirs, and dual-process chamber configuration, among others.
This product is designed for ease of maintenance activities. As with all JST wet benches, this cleaning system comes with our standard 24/7 Technical Support.
