Front Linear Automated (FLA) Wet Bench

Designed for a Class 1 (ISO Class 3) Cleanroom, JST offers the Front Linear Automated (FLA) Wet Bench to process larger product profiles in an ultra-clean environment. This chemical wet bench allows for accurate process control, high throughput, and production flexibility by providing multiple lot processing simultaneously with a variety of processing parameters.

The FLA supports semi-automated or automated operation with a variety of integrated wafer input and output requirements.  As with all JST wet benches, they are designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.

Standard Features

  • Material Options:  304L Stainless Steel, 316L Stainless Steel, FM Approved PVC-C, or White Polypropylene
  • Internal Stainless Steel frames isolated from process chemistry
  • Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
  • Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
  • Ergonomically mounted 23” Color Touchscreen Monitor, with  JST GENII Software
  • Integrated HEPA filters provides an ultraclean process environment
  • Ergonomically designed front or side load/unload access for product cassettes
  • Automated, Multi-tasking, or Semi-Automated operation platforms
  • Robust dual rail Front Linear Transfer provides stable high speed product movement
  • Front access maintenance with easy lift-off hinged doors
  • Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
  • Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
  • Compatible with any JST chemical or rinse process modules
Front-Linear-Automated-(FLA)-Wet-Bench(2)

Optional Features 

  • GEM/SECSII Factory Automation Interface
  • Automated process or transport cassette stocking
  • Automated cassette to cassette wafer transfer (transport to process)
  • Configurations for both manual operator loading or factory automation with FOUP or SMIF load ports
  • Selectable Notch Aligner
  • Pre and Post Wafer scanner with Cross Slot Detection and wafer  mismatch alarms
  • CO2 Fire Suppression System
  • Static eliminating de-ionizer bars provided under the HEPA filters in the wafer transfer area
  • Nitrogen and DI Water Hand Spray Guns
  • On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage.
  • Dry to Dry configuration using JST’s IPA Dryers
  • SEMI S2 Certification
  • CE Marking
  • 3rd Party Electrical Inspections
Rear-Linear-Automated-Wet-Bench

Applications For Front Linear Automation (FLA) Wet Bench

Front-Linear-Automated-(FLA)-Wet-Bench-(4)