Spinner Hot Plate Manual Wet Bench

JST’s Spinner Hot Plate (SHP) Manual Wet Bench is an updated style of chemical fumehood designed for manual lithography processes such as photoresist coating, baking, and developing up to 200mm wafers. The unique exhaust design pulls laminar air evenly across the work surface maintaining the same clean laminar air inside the work area as in the clean room. Particles and vapor fumes from the chemistry are pulled away from the operator.

JST’s SHP Wet Benches are designed for ease of use, service, and meets Semi ergonomic requirements allowing the most efficient operator activities for a chemical bench.  JST integrates standard OEM Spinner modules and/or Hot Plates which mount in a sealed deck area with easily accessible storage and maintenance through hinged doors.

As with all JST wet benches, they are designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.

Standard Features

  • Sealed Work Surface
  • Material Options:  304L Stainless Steel, 316L Stainless Steel, FM Approved PVC-C, or White Polypropylene
  • Purged Electrical Compartments
  • Exhaust Failure Alarm
  • Emergency Power Off
  • Drip Tray with Leak Detection
  • Seismic Anchors
  • Lockout/Tagout Box
  • Front & Side Safety Shields
  • Compatible with most OEM Spinner or Hot Plate modules
  • Ergonomic reach to touchscreen controllers which are isolated from process fumes
  • Exhausted lower storage area

Optional Features Include 

  • Rear Access Compartment
  • Drain to Carboy (reusable or disposable)
  • HEPA Filtration Module
  • Fire Suppression (CO2 or H2O)
  • N2 or DI Hand Spray
  • Vacuum Wands w/ Interchangeable tip
  • Beaker Dry Rack
  • Chemical Collection Cup Sink Drain
  • Bottle Holders
  • LED Lighting white or amber color
  • Explosion Proof Receptacle
  • CO2 Fire Suppression Systems
  • SEMI S2 Certification
  • CE Marking
  • 3rd Party Electrical Inspections