Products
Chemical Delivery System
From entire units to single carts, all JST chemical delivery systems are designed to safely dispense acids, bases, and solvents in a laboratory or cleanroom environment.
A Chemical Delivery System to Safely Dispense Chemicals
JST’s chemical delivery systems are engineered to provide safe, reliable, and flexible chemical dispensing solutions for laboratory and cleanroom environments. Designed to handle a variety of chemistries including acids, bases, and solvents, these systems range from compact mobile chemical carts to comprehensive chemical dispense units capable of supporting multiple wet benches. We also offer 30- and 55-gallon chemical cabinets that integrate seamlessly with our delivery platforms, providing secure storage and controlled dispense from standard drum sizes.
Each delivery system emphasizes long-term reliability and ease of maintenance, helping facilities maintain uninterrupted operations with minimal downtime. The chemical dispense units are available with features such as multiple drum capacities, ergonomic handling, and optional mixing or day tanks to meet diverse process needs. Our portable chemical carts offer a cleanroom-compatible, pneumatically powered solution that eliminates the need for dedicated electrical service while ensuring safe chemical transport and delivery.
As with all JST products, these systems are built with a focus on safety and flexibility and come standard with 24/7 technical support. By integrating these advanced chemical delivery systems into their semiconductor and laboratory workflows, customers benefit from enhanced operational efficiency and improved process control.
JST Chemical Management
Chemical Delivery Systems
As with all of JST’s wet processing equipment, these products are designed for flexibility, safety, and come with our standard 24/7 Technical Support.
Chemical Dispense Unit
Chemical Cart
Chemical Dispense Unit (CDU)
For use with solvents, acids, or bases, JST’s Chemical Dispense Units (CDU) are available using drums for chemical storage as well as providing fresh chemistry to process stations or laboratory use areas.
The Automatic Chemical Dispensing System holds up to three separate chemicals and dispenses them to multiple wet benches. Rollers are provided to easily load and unload drums. This chemical delivery system is available for solvents, bases or acids. Available options include chemical mixing, day tanks, and valve manifold boxes.
Chemical Cart
JST’s Chemical Cart is a safe, portable way to deliver chemicals to multiple wet benches. These self-contained carts can hold disposable chemical containers, reusable reservoirs, or pressure vessels. Chemical is provided to the wet bench using an integrated pump or high purity gas to a pressure vessel. The carts are cleanroom compatible and pneumatically powered, requiring no electrical service.
Chemical Delivery System FAQs
What is a single-wafer cleaning system?
Single-wafer cleaning systems are wet processing tools designed to clean individual semiconductor wafers in a highly controlled environment. They use specific chemical, rinsing, and drying steps to target and remove microscopic particles and residues from the wafer surface, which is essential to achieving the high purity that silicon and compound semiconductor devices require. By minimizing defects and boosting chip yields, single-wafer cleaning is especially critical for 300mm wafers and devices with smaller geometries or complex 3D structures, where even minimal variations between wafers can significantly impact device performance and reliability.
What is a chemical delivery system?
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How are chemical delivery systems designed to support multiple wet benches or points of use?
Ready to get started?
So are we. To learn more about JST's wet processing systems that are proven to increase ROI, minimize cleanroom footprints, and yield higher through-put rates, contact us today.