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Products

Process Modules

JST’s semiconductor wet cleaning process modules are designed to be integrated into our manual or automated wet benches. Combine multiple modules for a completely custom configuration.

Flexible Wet Cleaning Process Modules

Combine multiple process modules for a completely custom automated wet bench or manual wet bench configuration.

JST’s semiconductor wet cleaning process modules are designed to be integrated into any of JST’s manual or automated semiconductor wet process platforms. These modules have been specifically designed for wet process semiconductor manufacturing. Multiple modules are available for batch semiconductor processes.

JST Products

Process Modules

As with all of JST’s wet processing equipment, these process modules are designed for flexibility, safety, and come with our standard 24/7 Technical Support.

Ambient Static Bath

Constant Temperature Bath

Heated Downflow Bath

Heated Filtered Bath

Heated Static Bath

Megasonic Bath

Quick Dump Rinser

Ultrasonic Bath

ambient-static-bath-basin

Ambient Static Bath

JST’s Ambient Static Baths process modules are designed for the clean processing of acids, bases, or solvents where temperature and recirculation are not required. As with all JST process baths, coved corners and sloped bottoms provide ease of cleaning. Constructed from durable, low-maintenance materials, each Ambient Static Bath is designed with coved corners for cleanliness and a sloped bottom to assure quick, complete draining.

constant temperature bath

Constant Temperature Bath

JST’s Constant Temperature Bath maintains accurate temperature control, uniform recirculation flow, and particle removal. The chemical enters the bath from the bottom, flows evenly across the substrates, and then cascades over a four-sided weir.

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Heated Downflow Bath

JST’s Heated Downflow Baths are designed for efficient metal lift-off and removal of thick films. Recirculation and filtration are provided to remove the lifted material from the bath and chemistry.

heated-filtered-bath-product

Heated Filtered Bath

JST’s Heated Filtered Bath improves chemical life and efficient particulate removal by continuously filtering the process chemicals. The chemical enters the bath from the bottom, flows evenly across the substrates, and then cascades over a four-sided weir.

heated-static-bath-product

Heated Static Bath

JST’s Heated Static Baths are designed to safely maintain a consistent temperature for processing with acids, bases, or solvents. The Heated Static Bath utilizes heating elements bonded to the inner walls in order temperature. As with all JST process baths, coved corners and sloped bottoms provide ease of cleaning.

megasonic-bath-product

Megasonic Bath

JST’s Megasonic Baths produce a greater level of cleaning performance by applying high frequency energy (> 700 kHz) to effectively remove submicron particles via acoustic cavitation. JST offers heated, ambient, static, or recirculated megasonic baths and Quick Dump Rinsers, giving customers the ability to fine tune their processes.

quick-dump-rinser-product

Quick Dump Rinser

JST’s Quick Dump Rinser (QDR) process module is used to quickly remove chemicals from substrates using DI Water. This system includes comes with recipe-programmable overflow rinse, top spray, and drain/dumping capabilities.

ultrasonic-bath-product

Ultrasonic Bath

JST’s Ultrasonic Baths are designed to enhance cleaning processes with either solvents or aqueous chemistries. Single and multiple ultrasonic cleaning frequencies are available. Bath designs utilize coved corners to eliminate particle traps, making the bath easy to keep clean.

Ready to get started?

So are we. To learn more about JST's wet processing systems that are proven to increase ROI, minimize cleanroom footprints, and yield higher through-put rates, contact us today.