Pre-Diffusion Clean
Pre-Diffusion Clean
JST’s Pre-Diffusion Clean process removes light organics, silicon dioxide layers, particles, and metals; protective oxide regrowth.
- STEP 1: HF (50:1) – Constant Temperature Bath
- STEP 2: Rinse – Quick Dump Rinser Bath
- STEP 3: SC1 – Heated Filtered Bath
- STEP 4: Quick Dump Rinser
- STEP 5: SC2 – Heated Filtered Bath
- STEP 6: Quick Dump Rinser Bath (optional Megasonic Bath)
- STEP 7: Dry – Surface Tension Gradient Dryer (Marangoni Dryer)
Pre-Diffusion Clean Overview
JST’s Pre-Diffusion Clean process removes light organics, silicon dioxide layers, particles, and metals, and protective oxide regrowth.
As with all JST process applications, the Pre-Diffusion Clean comes with JST’s standard 24/7 Technical Support.
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