Constant Temperature Bath
Constant Temperature Bath
JST’s Constant Temperature Bath maintains accurate temperature control, uniform recirculation flow, and particle removal.
- Material Options: natural polypropylene, PVDF, PFA, quartz, or 316L stainless steel
- PLC controlled with color touchscreen
- Programmable temperature, recirculation flow rate, and process time
- Full liquid level detection
- Sloped bottom to drain
- 4 -sided serrated overflow weir
- Temperature Range 40º C- 180º C /- 1.0º, thermocouple Type J temperature probe
- Coved corners to eliminate particle traps
- High purity Teflon DIW plumbing
- Drain screens
- 10″ inline filter housing
- Pneumatic bellows recirculation pump
- Dispersion cassette platform
- Teflon air operated valves
- Customizable to fit product
- Ultrasonic agitation
- Megasonic agitation
- Condensing cooling coils
- Mechanical agitation
- Automated or manual lid
- Dedicated drain to carboy
- Auto chemical fill and blending
- DIW drip to maintain chemical concentration
- Installation into JST’s Manual Wet Benches or Automated Wet Benches.
- Customizable product racks, fixtures, or process cassettes
- Resistivity or conductivity monitoring
- Piranha / Sulfuric Peroxide Resist Stripping
- Solvent Photoresist Stripping
- Nitride Etch
- Metal Etch
- KOH Etch / TMAH Silicon Etching
- Mixed Acid Etch
- SC1 clean
- SC2 clean
Constant Temperature Bath Overview
JST’s Constant Temperature Bath is designed to maintain accurate temperature control, uniform recirculation flow, and particle removal. The recirculated chemistry enters the bath from the bottom, flows evenly across the substrates, and then cascades over a four-sided weir. The chemistry temperature is controlled by a remote heat/chiller unit using closed-loop heat transfer coils that maintain the temperature in the bath or with a solid-state inline heat exchanger.
This bath is highly customizable, designed for ease of maintenance activities, and comes standard with 24/7 Technical Support.
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