Semiconductor Parts Cleaning
JST’s semiconductor parts cleaning wet benches are designed to provide cleaning and drying of equipment components used for semiconductor manufacturing. We collaborate with our customers to provide best solutions for handling and cleaning complex parts which incorporate reduced chemical usage, reduced footprint and efficient automation for the maximum return on investment.
Our parts cleaning wet benches are ergonomically designed with productivity and safety in mind for the most efficient operator performance of cleanroom equipment maintenance. As with all JST products, they come with our standard 24/7 Technical Support.
Semiconductor Parts Cleaning Options
Horizontal Quartz Diffusion Tube Cleaner
Semi-automated diffusion oven parts cleaning of quartz tubes, cassettes, and miscellaneous parts using immersion with parts rotation.
Vertical Quartz Diffusion Tube Cleaner
Semi-automated diffusion oven parts cleaning of quartz tubes, cassettes, and miscellaneous parts using chemical spray.
Automated Box Washer
Automated dry to dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPS, SMIF Pods, or other wafer handling parts.
Solvent Photobowl Cleaner
Specialized fumehood designed to provide a safe, exhausted work area for solvent cleaning of Lithography Track System Photo Bowls.
Vapor Degreaser
Semi-automated wet bench designed for critical cleaning or degreasing applications using flammable solvent vapor.
Industrial Ultrasonic Cleaner
Self-contained wet bench designed for precision in semiconductor parts cleaning using ultrasonic agitation.
Epi Foreline Tube Cleaner
Manual or semi- automated parts cleaning for EPI Foreline tubes and vacuum components in an exhausted dual contained wet bench.
Automated Parts Cleaning System
Automated dry to dry Parts Cleaning Wet Bench customizable for a multitude of parts and variety of chemical processes.
Teardown Fumehood
Specialized Fumehood with an enclosed work area designed to draw hazardous fumes away from operators for the safe tear down and rebuild of contaminated parts.
Horizontal Quartz Diffusion Tube Cleaner
Semi-automated diffusion oven parts cleaning of quartz tubes, cassettes, and miscellaneous parts using immersion with parts rotation.
Vertical Quartz Diffusion Tube Cleaner
Semi-automated diffusion oven parts cleaning of quartz tubes, cassettes, and miscellaneous parts using chemical spray.
Automated Box Washer
Automated dry to dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPS, SMIF Pods, or other wafer handling parts.
Solvent Photobowl Cleaner
Specialized fumehood designed to provide a safe, exhausted work area for solvent cleaning of Lithography Track System Photo Bowls.
Vapor Degreaser
Semi-automated wet bench designed for critical cleaning or degreasing applications using flammable solvent vapor.
Industrial Ultrasonic Cleaner
Self-contained wet bench designed for precision parts cleaning using ultrasonic agitation.
Epi Foreline Tube Cleaner
Manual or semi- automated parts cleaning for EPI Foreline tubes and vacuum components in an exhausted dual contained wet bench.
Automated Parts Cleaning System
Automated dry to dry Parts Cleaning Wet Bench customizable for a multitude of parts and variety of chemical processes.
Teardown Fumehood
Specialized Fumehood with an enclosed work area designed to draw hazardous fumes away from operators for the safe tear down and rebuild of contaminated parts.
