JST’s Heated Filtered Bath improves chemical life and provides efficient particulate removal by continuously filtering the process chemicals. The chemical enters the bath from the bottom, flows uniformly across the substrates, and then cascades over a four-sided serrated weir. The heating elements are bonded to the outer walls, insulated, and contained within an outer shroud that is N2 purged. Inline heaters are available for large, high temperature baths that require a fast heat-up time or higher processing temperatures.

As with all JST process modules, the heated baths comes with JST’s standard 24/7 Technical Support.