Pre-Gate and Pre-Metal Clean
Pre-Gate and Pre-Metal Clean
Pre-Gate and Pre-Metal Clean processes remove light organics, silicon dioxide layer, particles, and metals.
- STEP 1: HF (50:1) – Constant Temperature Bath
- STEP 2: Rinse – Quick Dump Rinser Bath
- STEP 3: SC2 – Quartz Heated Filtered Bath
- STEP 4: Rinse – Quick Dump Rinser
- STEP 5: Dry – Surface Tension Gradient Dryer (Marangoni Dryer)
OR
- STEP 1: SC1 – Quartz Heated Filtered Bath (optional Megasonic Bath)
- STEP 2: Rinse – Quick Dump Rinser Bath
- STEP 3: HF (50:1) – Constant Temperature Bath
- STEP 4: Rinse – Quick Dump Rinser
- STEP 5: Dry – Surface Tension Gradient Dryer (Marangoni Dryer)
Pre-Gate and Pre-Metal Clean Overview
Remove light organics, silicon dioxide layer, particles, and metals.
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