Spinner Hot Plate Manual Wet Bench

Spinner Hot Plate Manual Wet Bench

JST’s Spinner Hot Plate (SHP) Manual Wet Bench is an updated style of chemical fume hood designed for manual lithography processes such as photoresist coating, baking, and developing up to 200mm wafers.

  • Sealed work surface
  • Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene
  • Purged electrical compartments
  • Exhaust failure alarm
  • Emergency power off
  • Drip tray with leak detection
  • Seismic anchors
  • Lockout/tag out box
  • Front and side safety shields
  • Compatible with most OEM spinner or hot plate modules
  • Ergonomic reach to touchscreen controllers which are isolated from process fumes
  • Exhausted lower storage area
  • Drain to carboy (reusable or disposable)
  • HEPA filtration module
  • Fire suppression (CO2 or H2O)
  • N2 or DI hand spray
  • Vacuum wands w/ interchangeable tip
  • Beaker dry rack
  • Chemical collection cup sink drain
  • Bottle holders
  • LED Lighting white or amber color
  • Explosion proof receptacle
  • CO2 fire suppression systems
  • SEMI S2 certification
  • CE marking
  • 3rd party electrical inspections

Spinner Hot Plate Manual Wet Bench Overview

JST’s Spinner Hot Plate (SHP) Manual Wet Benches are designed to facilitate efficient chemical bench operation by meeting semi-ergonomic requirements. By pulling laminar air evenly across the work surface, the unique exhaust design preserves clean laminar air inside the work area and in the clean room. Particles and vapor fumes from the chemistry are directed away from the operator.

JST standard configuration integrates OEM Spinner modules and/or hot plates which mount in a sealed deck area. The Spinner Hot Plate is equipped with a drip tray with leak detection and touchscreen controllers. HEPA filtration modules, fire suppression, and a sink drain may be added to this wet bench for JST customers who require those options.

This workstation is equipped with storage behind hinged doors. As with all JST wet benches, they are designed for ease of maintenance activities and come with our standard 24/7 Technical Support.