Automated Wet Bench

JST designs automated wet processing equipment to meet rigorous wet bench semiconductor process needs. With multiple platforms available in our diverse lineup we offer automated wet benches for product sizes of up to 300mm wafers and larger materials. These automated wet benches are designed with safety in mind for use with acids, bases, solvent or a combination of chemistries. Just load your cassettes then let the process begin on your new chemical wet bench.

With close to 40 years of business experience as a semiconductor wet bench manufacturer, our in-house manufacturing allows us to control quality at all points of production. Our capabilities for designing automated chemical wet benches allows us to make wet process equipment for unique sized substrates and environments in addition to our standard wet bench product lines.

To meet your semiconductor wet process equipment criteria, JST offers multiple operational platforms for its automated wet bench product lines.  

  • Automated: Provides a platform for high throughput applications with the optional ability for Multitasking. Our look ahead scheduling software allows for processing of multiple lots with unique recipes inside of a single automated wet bench saving floor space and chemical usage.
  • Semi-Automated:  Is a cost effective solution in lower throughput applications where process repeatability is crucial. Our optional Dual Process Automation increases the throughput by allowing a second simultaneous process flow in the same automated wet bench. This design provides a lower cost and smaller footprint option for installations where automation is required.

- JST Automated Wet Bench Lineup -

Front Linear Automated (FLA)

Front-Linear-Automated-(FLA)-Wet-Bench-(1)
  • Front Mounted Linear Transfer with rear–plumbing component access compartment
  • Multiple Linear Transfer Options for increased throughput
  • HEPA Filtered Process Environment
  • Automated or Semi-Automated platforms
  • Larger product processing capable
  • GEM/SECSII Factory Automation integration capable
  • Cleanroom Ballroom Mount or Bay and Chase Mount

Rear Linear Automated (RLA)

Rear-Linear-Automated-(RLA)-Wet-Bench-(1)-
  • Rear Mounted Linear Transfer with front plenum mounted component access
  • Multiple Linear Transfer Options for increased throughput
  • Optional HEPA Filtered Process Environment
  • Automated or Semi-Automated platforms
  • Midsized product processing capable
  • GEM/SECSII Factory Automation integration capable
  • Cleanroom Ballroom Mount or Bay and Chase Mount

Tigress Automated

Tigress-Automated-Wet-Bench-(2)
  • Compact Linear Transfer with optional rear plumbing component access compartment
  • Semi-Automated or Dual Automation platforms for increased throughput
  • Up to 200mm product size processing capable
  • Small two bath footprint
  • GEM/SECSII Factory Automation integration capable
  • Cleanroom Ballroom Mount or Bay and Chase Mount
- JST Semi-Automated Wet Bench Lineup -

Tigress XL Automated

Tigress-XL-Automated-Wet-Bench-(1)
  • Compact Linear Transfer with optional rear plumbing component access compartment
  • Semi-Automated or Dual Automation platforms for increased throughput
  • Up to 200mm product size processing capable
  • Small three bath footprint
  • GEM/SECSII Factory Automation integration capable
  • Cleanroom Ballroom Mount or Bay and Chase Mount

3-Axis Compact

3-Axis-Compact-Automated-Wet-Bench-(1)
  • Overhead Mounted 3-Axis Linear Transfer with optional rear plumbing component access compartment
  • Semi-Automated or Dual Automation platforms for increased throughput
  • Up to 200mm product size processing capable
  • Small multiple bath footprint
  • GEM/SECSII Factory Automation integration capable
  • Cleanroom Ballroom Mount or Bay and Chase Mount

Overhead Linear Automated (OLA)

Overhead-Lineart-Automated-(OLA)-Wet-Bench-(1)
  • Overhead Mounted Linear Transfer with optional rear component access compartment and plenum mounted component access
  • Multiple Linear Transfer Options for increased throughput
  • Automated or Semi-Automated platforms.
  • Largest / heaviest product processing capability
  • GEM/SECSII Factory Automation integration capable
  • Cleanroom Ballroom Mount or Bay and Chase Mount