Heated Downflow Bath

JST’s Heated Downflow Baths are designed for efficient metal lift off and removal of heavy particles or thick films. Filtered, heated, solvent chemistry flows into the top of the bath, directly over the substrate lifting off the materials and removing it out the drain. This downflow action eliminates the possibility of the removed materials re-depositing back onto the wafer. With JST’s downflow design, the lifted off materials are captured in an external strainer for reclaim, and the chemistry is continuously filtered which prolongs chemical life. For fast heat up and high temperature control an Inline Heater is provided.

Standard Features

  • Material Options: 316L Stainless Steel brushed or electro polished finish
  • PLC controlled with color touchscreen
  • Programmable temperature, recirculation flow rate, and process time.
  • Full liquid level detection
  • Sloped funneled bottom to drain
  • Adjustable top chemical inlet sparger bars
  • Explosion Proof Solvent Inline Heater
  • Temperature Range 40º C- 120º C /- 1º. Thermocouple, type J Temperature probe
  • Pneumatic Bellows Recirculation Pump
  • Standard 10” inline filter housing
  • Inline strainer for metal or material reclaim
  • Stainless Steel air operated valves
  • Coved corners to eliminate particle traps
  • Customizable to fit product

Optional Features

  • Ultrasonic Agitation [Link to Ultrasonic Bath]
  • Condensing Cooling Coils
  • Mechanical agitation
  • Automated or manual lid
  • Dedicated drain to carboy
  • Flow sensor
  • Electric Centrifugal pump
  • Pump Stroke monitoring
  • Auto chemical fill and blending
  • Installation into JST’s Manual or Automated Wet Benches
  • Customizable product racks, fixtures, or carriers