Heated Downflow Bath

JST’s Heated Downflow Baths are designed for efficient metal lift off and removal of heavy particles or thick films. Filtered, heated, solvent chemistry flows into the top of the bath, directly over the substrate lifting off the materials and removing it out the drain. This downflow action eliminates the possibility of the removed materials re-depositing back onto the wafer. With JST’s downflow design, the lifted off materials are captured in an external strainer for reclaim, and the chemistry is continuously filtered which prolongs chemical life. For fast heat up and high temperature control an Inline Heater is provided.