JST’s Heated Downflow Baths are designed for efficient metal lift off and removal of thick films. Recirculation and filtration are provided to remove the lifted material from the bath and chemistry.

Filtered, heated, solvent chemistry flows into the top of the bath, directly over the substrate lifting off the materials and removing them out the drain. This downflow action eliminates the possibility of the removed materials returning to the wafer.

JST’s downflow design captures the lifted-off materials in an external strainer for reclaim, and the chemistry is continuously filtered. This cost-saving system prolongs chemical life. For fast heat up and high temperature control, an inline heater is provided.

As with all JST process modules, heated baths comes with standard 24/7 Technical Support.