Heated Static Bath
JST’s Heated Static Baths are designed to safely maintain a consistent temperature for processing with acids, bases, or solvents. Quartz and stainless steel baths utilize heating elements bonded to the inner walls, insulated and enclosed within a N2 purged shroud. Plastic baths have submersible Teflon coated immersion heaters located in the bottom. As with all JST process baths, coved corners and sloped bottom provide for ease of cleaning.
Standard Features
- Material Options: Natural Polypropylene, PVDF, PFA, Quartz or 316L Stainless Steel
- PLC controlled with color touchscreen
- Programmable temperature and process time
- Full liquid level detection
- Sloped bottom to drain
- Temperature Range 40º C- 180º C /- 1.0º, Thermocouple, type J Temperature probe
- Coved corners to eliminate particle traps
- Drain Screens
- Air Operated Valves
- Customizable to fit product
Optional Features
- Ultrasonic agitation
- Megasonic agitation
- Condensing Cooling Coils
- Mechanical agitation
- Automated or manual lid
- Dedicated Drain to carboy
- Auto chemical fill and blending
- DIW Drip to maintain chemical concentration
- Installation into JST’s Manual or Automated Wet Benches.
- Customizable product racks, fixtures, or Process Cassettes
- Resistivity or Conductivity Monitoring
Applications
- Piranha / Sulfuric Peroxide Resist Stripping
- Solvent Photoresist stripping
- Nitride Etch
- Metal Etch
- KOH / TMAH Silicon Etching
- SC1 Clean
- SC2 Clean
- Mixed Acid Etch
