Semiconductor Parts Cleaning

Automated Box Washer

Automated dry-to-dry wet bench designed for cleaning wafer cassettes, transport boxes, lead frames, FOUPS, SMIF Pods, or other wafer handling parts. Items to be cleaned are placed onto racks and loaded into the washer’s process chamber, where they undergo the Box Washer’s automated cleaning, rinsing, and drying cycle. The Automated Box Washer features rotating top and bottom DIW spray bars and Static side DIW and N2 Spray Bars. This platform is equipped with a heated, recirculating HEPA-filtered drying system and an on-demand hot DIW heater.

Automated Parts Cleaning System

JST’s Automated Parts Cleaning System services a multitude of parts, performs a variety of chemical processes and restores specialty parts to a chemically clean state. The cleaners utilize either semi-automated or automated platforms that provide accurate control, high throughput, and production flexibility.

EPI Foreline Tube Cleaner

JST’s EPI Foreline Tube Cleaner provides manual or semi-automated parts cleaning for EPI Foreline tubes and vacuum components in an exhausted dual-contained wet bench. The EPI Foreline Tube Cleaner is safe to use with acids, bases, oxidizers, or other cleaning chemistries associated with the foreline maintenance process.

Horizontal Quartz Diffusion Tube Cleaner

For cleaning quartz-ware, JST offers a semi-automated diffusion oven parts cleaning of quartz tubes, cassettes, and miscellaneous parts that uses chemical immersion with parts rotation in an ultra-clean environment. The system rotation of the parts during processing results in uniform cleaning and a reduction of chemical usage. The self-monitoring, ergonomic chemical workstation provides tight process control and technician safety.

Industrial Ultrasonic Cleaner

The Industrial Ultrasonic Cleaner is a self-contained wet bench designed to deliver precision cleaning of semiconductor parts using ultrasonic agitation, with a variety of frequencies. The Industrial Ultrasonic Cleaner supports both flammable solvents and aqueous chemistries for cleaning purposes. Process capabilities include heating, over-flow recirculation, multiple chemistries, DIW rinsing, and drying.

Solvent Photo-Bowl Cleaner

JST’s Solvent Photo-Bowl Cleaner Wet Bench is a specialized fume hood designed for cleaning Lithography Track System Photo-Bowls and other miscellaneous parts using solvents. The Photo-Bowl Cleaner is designed to safely process and clean parts using flammable solvents in an exhausted, enclosed, and dual-contained area. The multiple solvent soak baths, exhausted work surfaces, and solvent hand sprays provide an ideal workspace to oversee the maintenance and cleaning of track system components.

Teardown Fumehood Workstation

With JST’s Teardown Fumehood Workstation, an enclosed work area this specialized fume hood creates an environment for operators to perform safe tear-downs and rebuild of contaminated semiconductor parts. Hazardous fumes are safely drawn away from the operator through the rear exhaust plenum.

Vapor Degreaser

JST offers the Vapor Degreaser wet bench as a semi-automated solution for critical cleaning or degreasing applications using flammable solvent vapor. This system combines JST’s knowledge of flammable solvent equipment design with our automation expertise. The Vapor Degreaser is designed to automatically position the parts in an optimum position for condensing the IPA vapor for cleaning and then move them into an area for drying.

Vertical Quartz Diffusion Tube Cleaner

JST offers a semi-automated diffusion oven parts cleaning of quartz tubes, cassettes and miscellaneous parts in a vertical orientation.

The Vertical Quartz Diffusion Tube Cleaners are engineered with an efficient full-coverage spray to provide uniform cleaning while minimizing chemical usage. The Vertical Quartz Diffusion Tube Cleaner features integrated recirculation and filtration of process chemistries and purged chemical spray manifold for operator safety.