Products

Manual Wet Bench

JST Manual Wet Bench lineup features modular designs that meet custom specifications and all Semi, CE, NFPA, and OSHA requirements.

Fully Customizable and Completely Configurable
Manual Wet Benches

JST designs, manufactures, and services customizes manual wet processing equipment that consumes a small cleanroom footprint and generates high-throughput results.

JST’s commitment to producing safe and durable wet benches continues to expand as the company fulfills a growing demand for semiconductor cleaning and chemical processing systems. After 40 years of innovative engineering and client collaboration, JST has implemented standards of excellence that improve ROI. Every wet bench is designed to meet custom specifications, making JST equipment ideal for wet laboratory, R&D, and parts-cleaning equipment applications.

One of the significant benefits of JST’s selection of manual platforms is that their configurations can be fully customized. Our wet processing benches feature a modular design that meets all Semi, CE, NFPA, and OSHA requirements. They are designed for reliability and longevity with chemical resistant shells, work surfaces, and baths. Due to their economical design, JST’s manual wet benches are an ideal choice for universities and research facilities.

These customizable platforms are designed and assembled at JST’s facility in Meridian, Idaho. The 60k square-foot space is equipped with equipment to address all aspects of mechanical and electrical assembly, as well as plastics and metal fabrication. With over 40 years of experience as a semiconductor wet bench manufacturer, JST’s expert workforce oversees quality control at all points of production. Beyond standard equipment, JST’s resources allow the company to fulfill customized wet bench orders for all purposes, materials, and environments.

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Fully Customizable

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24/7 Technical Support

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Designed for Safety and Flexibility

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Cost-Effective

JST Wet Benches

Manual Wet Benches

Process acids, bases, solvents, or a combination of chemistries on a manual wet processing machine to produce consistently outstanding results.

Chemical Fume Hood

Chemical Workstation

Spinner Hot Plate

Vertical Laminar Flow

operator using wet bench chemical fume hood

Chemical Fume Hood

Modular Chemical Fume Hood manual wet processing bench is designed to draw hazardous fumes away from the process technician. The Fume Hood encloses the entire work area and its clear lifting shield is counterbalanced and easily adjusted for raising and lowerinbg. Applications include cleaning Lithography Photo-Bowls, EPI Foreline Tubes, Quartz ware, and many more miscellaneous parts. This Fume Hood ensures a safe, particle-free environment for operators working with volatile chemistries.

Optional features include Onboard Chemical Neutralization, HEPA Filtration Module, ergonomic Control Columns, and more.

chemical workstation

Chemical Workstation

JST’s chemical workstations are designed for use as an exhausted work surface for maintenance and chemical processing. The work surface is liquid-tight, maintaining a dry storage area below the surface. This lower storage area is accessed with hinged doors in the front of the workstation. A clear vertical lifting shield, which is counterbalanced for easy raising and lowering, provides a barrier between the wet processing area and the operator. The Workstation regulates air flow and guides hazardous chemicals through the rear exhaust plenum to ensure a safe work environment. These wet processing benches are constructed for ease of maintenance, flexibility, and safety.

Optional features include a utility sink with faucet, lower exhausted storage compartment, and more.

spinner-hot-plate-manual-wet-bench

Spinner Hot Plate

Designed for integrating photoresist spinners, developers, and baking hotplates. Similar to the VLF design, the Spinner Hot Plate shell includes an additional welded-in deck and spacious lower support area. JST’s SHP Wet Benches are designed for ease of use, service, and meet Semi-ergonomic requirements. allowing the most efficient operator activities for a chemical bench. Features Drip Tray with Leak Detection and Touchscreen Controllers.

Optional features include Beaker Dry Rack, Bottle Holders, LED lights, and more.

Vertical-Laminar-Flow-Manual-Wet-Bench-technician-working

Vertical Laminar Flow (VLF)

Compatible with any JST process module, the VLF wet bench is designed for processing wafers up to 200mm in size. The unique exhaust design pulls laminar air evenly across the work surface maintaining the same clean laminar air inside the work area as in the clean room. The VLF was designed with productivity in mind and meets all SEMI ergonomic requirements allowing the most efficient operator activities for a chemical bench

Optional features include SEMI S2 Certification, Fire Suppression, Rear Access Compartment, and more.

FAQs

What is a single-wafer cleaning system?

Single-wafer cleaning systems are wet processing tools designed to clean individual semiconductor wafers in a highly controlled environment. They use specific chemical, rinsing, and drying steps to target and remove microscopic particles and residues from the wafer surface, which is essential to achieving the high purity that silicon and compound semiconductor devices require. By minimizing defects and boosting chip yields, single-wafer cleaning is especially critical for 300mm wafers and devices with smaller geometries or complex 3D structures, where even minimal variations between wafers can significantly impact device performance and reliability.

How are chemical delivery, overflow, and drain paths configured, and where are the failure points?

Manual wet benches typically rely on gravity-fed or pumped chemical supply with open baths. Overflow and drain paths are fixed by plumbing layout, making drain sizing, slope, and compatibility with facility neutralization systems critical. Most failure modes are caused by fittings, valves, or improperly balanced overflow rates rather than the bath itself.

What utility stability is required for DI water flow, temperature, and pressure during rinse steps?

Manual systems assume relatively stable DI supply conditions. Primary requirements typically include ultra-pure resistivity (>18.2 MΩ·cm at 25°C), high pressure (typically 30-70 PSI), and consistent, room-temperature or controlled-temperature flow rates. Variations in pressure or temperature directly affect rinse effectiveness and drag-out.

How is exhaust velocity maintained across different bath chemistries and tank configurations?

Manual benches rely on constant-volume exhaust tied to the facility system. Hood geometry and sash configuration determine capture efficiency. Adjustments are mechanical, not dynamic, and must be validated during installation.

How are process timing and sequence enforced at the tool level?

Timing and sequence are controlled procedurally rather than mechanically. The system doesn’t enforce dwell times, transfer speeds, or rinse duration. Timing and sequence compliance are enforced through a combination of operator adherence to written standard operating procedures (SOPs) and embedded, tool-level, microprocessor-based controls.

How are safety interlocks implemented for power, exhaust, and chemical exposure?

Safety controls are typically limited to facility interlocks such as exhaust flow confirmation, emergency power cutoff, and local alarms. The bench itself does not actively manage abnormal process states.

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So are we. To learn more about JST's wet processing systems that are proven to increase ROI, minimize cleanroom footprints, and yield higher through-put rates, contact us today.