JST’s Automated Box Washer is a self-contained unit that performs cleaning and drying tasks for sensitive materials, such as substrate-handling cassettes, transport boxes, semiconductor wafers, and disk drive components. Items are placed onto racks and loaded into the washer’s process chamber, where they undergo the Box Washer’s automated cleaning, rinsing, and drying cycle. This automated dry-to-dry wet bench also supports lead frames, FOUPS, SMIF Pods, or other wafer-handling parts.

The washer features rotating top and bottom DIW spray bars and Static side DIW and N2 spray bars. This platform is equipped with a heated, recirculating HEPA-filtered drying system and an on-demand hot DIW heater. To serve the different needs of JST’s customers, customizable product racks and flexible chamber sizes are available for the washer. JST’s washer and dryer box may be customized to include an additional HR Heater for reduced dry time. Other optional features for this platform include multiple surfactant supply reservoirs and in-line chemical filtration, among others.

As with all JST wet benches, the Automated Box Washer is designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.