Overhead Linear Automated Wet Bench
Overhead Linear Automated Wet Bench
As the most versatile automated wet bench offered in the JST product lineup, the Overhead Linear Automated Wet Bench platform may be customized to accomplish any number of tasks.
- Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene
- Internal stainless steel frames isolated from process chemistry
- Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
- Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
- Ergonomically mounted 23″ color touchscreen monitor, with JST GENII software
- Adaptable design for front or side load/unload access of product carriers
- Automated, multi-tasking, or semi-automated operation platforms
- Robust Overhead Linear Transfer provides stable high-speed product movement
- Front access maintenance with easy lift-off hinged doors
- Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
- Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
- Compatible with any JST chemical or rinse process modules
- GEM/SECS II factory automation interface
- Automated process or transport cassette stocking
- Automated cassette-to-cassette wafer transfer (transport to process)
- Configurations for both manual operator loading or factory automation with FOUP or SMIF load ports
- Selectable notch aligner
- Pre- and post-wafer scanner with cross slot detection and wafer mismatch alarms
- 3-axis automation capable of reduced footprint
- CO2 fire suppression system
- Nitrogen and DI water hand spray guns
- On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage
- Dry to Dry configuration using JSTss IPA Dryers
- Material transport cart or conveyor integration
- Roll Out process modules for ease of maintenance
- SEMI S2 certification
- CE marking
- 3rd party electrical inspections
- Pre-Diffusion Clean
- Nitride Etch
- Pre-Gate Clean
- Pre-Metal Clean
- Photoresist Stripping, Post Ash Clean, Post Implant Resist Strip, Post Etch Resist Strip (optional SC1)
- Metal Lift Off
- KOH Etch
- TMAH Etching
- Aqua Regia Etching
- Silicon Wafer Etching
- Lab or fab material cleaning
- HF, DHF, BOE Oxide Etching
- Automated Parts Cleaning System
- Solvent Photo-bowl Cleaner
- Industrial Ultrasonic Cleaner
- Megasonic Cleaner
Overhead Linear Automated Wet Bench Overview
The Overhead Linear Automated Wet Bench (OLA) is designed to accommodate a wide range of chemical processing for parts and materials that vary greatly in size and weight. With a customized OLA, FABS can expect more control while handling larger, heavier, and more awkward materials.
Compatible with any JST chemical or rinse process modules, the OLA supports semi-automated or automated operation with a variety of integrated wafer input and output requirements. The Overhead Linear wet bench is equipped with look-ahead scheduling software, a feature that allows for the processing of multiple lots with unique recipes at the same time. By improving throughput, multitasking capability saves time and floor space. In addition, the OLA can be modified to include an on-board chemical analyzer with integrated concentration control to monitor and reduce chemical usage.
This wet bench shares 3-axis automation with JST’s compact wet bench. Though both platforms offer the same high level of performance, only the OLA can accommodate the largest, heaviest parts. Product carriers in the OLA can be ergonomically accessed from the front or the side. Dry in and out processing is available utilizing JST’s Marangoni-style STG dryer. Customers also have the option of including a material transport cart or conveyor integration into their system.
As with all JST wet benches, the Overhead Linear wet bench is designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.
