Tigress Automated Wet Bench
Tigress Automated Wet Bench
As one of JST’s industry-leading automated wet benches, the Tigress Automated Wet Bench provides advanced automation in a compact footprint at a competitive price.
- Up to 200mm product size processing capable
- Material Options: 304L stainless steel, 316L stainless steel, FM-approved PVC-C, or white polypropylene
- Internal stainless steel frames isolated from process chemistry
- Industry-leading compact footprint
- Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
- Slide out panels for electrical components and transfer system front maintenance access
- Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
- Ergonomically mounted 23″ color touchscreen monitor, with JST GENII software
- Ergonomically designed front load/unload access for product cassettes
- Semi-automated operation platform
- Compact dual-axis linear transfer provides stable high-speed product movement
- Front access maintenance with easy lift-off front roll panel
- Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
- Compatible with any JST chemical or rinse process modules
- Dual automation platforms for increased throughput
- Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
- GEM/SECS II factory automation interface
- CO2 fire suppression system
- Nitrogen and DI water hand spray guns
- On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage
- Dry to Dry configuration using JST’s IPA Dryers
- SEMI S2 certification
- CE marking
- 3rd party electrical inspections
- SC1 Clean
- SC2 Clean
- Nitride Etch
- Pre-Gate Clean
- Pre-Metal Clean
- Photoresist Stripping, Post Ash Clean, Post Implant Resist Strip, Post Etch Resist Strip (Optional SC1)
- Metal Lift Off
- KOH Etch
- TMAH Etching
- Aqua Regia Etching
- Silicon Wafer Etching
- Lab or fab material cleaning
- HF, DHF, BOE Oxide Etching
Tigress Automated Wet Bench Overview
As one of JST’s industry-leading automated wet benches, the Tigress provides advanced automation in a compact footprint at a competitive price. The Tigress was designed to automate part of the cleaning, etching, and stripping process without taking up valuable lab space. The automation makes the process more repeatable due to recipe control rather than an operator. Semiconductor manufacturers depend on JST’s Tigress system to perform stripping, etching, and cleaning of semiconductor substrates. The Tigress is configured to isolate the automation from the process area for ultraclean results at a lower price point.
This compact wet bench reduces facility costs by reducing floor space and lowering exhaust requirements. The Tigress has a two-bath footprint in the lab, capable of processing products up to 200mm in size. The Tigress may be customized with dual automation to enhance product throughput. The Tigress also supports Dry to Dry processing using JST’s Marangoni STG Combo Rinse Dryer as an additional option. Customers may opt for the additional rear-access maintenance area, which provides dual containment for reservoirs, pumps, filters, and plumbing.
As with all JST wet benches, the Tigress Automated is designed for easy maintenance activities and comes with our standard 24/7 Technical Support.
