The Vertical Laminar Flow (VLF) manual wet bench is a chemical fume hood with an updated design and set of features that allow process technicians to manually process up to 200mm wafers. The unique exhaust design pulls laminar air evenly across the work surface maintaining the same clean laminar air inside the work area as in the clean room. Particles and vapor fumes from the chemistry are pulled away from the operator. The VLF was designed to ensure safety, increase productivity, and meet all SEMI ergonomic requirements with an ergonomic design.

The VLF is compatible with any JST chemical or rinse process modules, this manual chemical processing system can be configured to perform a multitude of cleaning and etching tasks, including: Pre-Diffusion Clean, Pre-Gate Clean, Pre-Metal Clean, and Post-Ash, Nitride Etch, KOH Etch, silicon etching, Metal Lift Off, and Photoresist Stripping. The VLF station is equipped with welded, sealed secondary containment.

JST’s VLF platform is distinguished by its ergonomic slant, which allows technicians better access and visibility. This station’s touchscreen controllers are designed for ease of use. The VLF chemical bench offers a variety of options to modify the system to meet customer needs, making it a practical tool to perform these operations safely.

Ergonomically designed for convenience and technician safety, these wet processing benches are certified to satisfy ASHRAE ventilation requirements. As with all JST wet benches, VLF are designed for ease of maintenance activities and come with our standard 24/7 Technical Support for the life of the tool.