EPI Foreline Tube Cleaner

JST’s EPI Foreline Tube Cleaner wet bench is designed to create a safe and efficient way of cleaning the foreline tubes and other parts of an EPI reaction chamber.  The exhausted wet bench is safe to use with acids, bases, oxidizers, or other cleaning chemistries associated with the foreline maintenance process.  The integral automated lift provides safe ergonomic cleaning of large heavy components.  As with all JST wet benches, they are designed for ease of maintenance activities and come with our standard 24/7 Technical Support.

Standard Features

  • Material Options:  FM Approved PVC-C, or White Polypropylene
  • Internal Stainless Steel frames isolated from process chemistry
  • Designed with a programmable logic controller (PLC) in addition to an industrial PC that control the entire wet bench
  • Ergonomically designed front load/unload access for product utilizing an automated vertical lift
  • Semi-automated operation platform
  • Front removable panels for easy maintenance access
  • Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
  • Automated chemical handling using an on-board chemical storage reservoir
  • Integrated recirculation and filtration of process chemistries
  • Motorized assist product lifts

Optional Features 

  • Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
  • Custom part fixtures
  • Additional on-board chemical storage reservoirs
  • External Chemical Dispense Cart fill  and Chemical Waste Pump Cart
  • Bulk chemical fill interface
  • On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage
  • Hot DIW rinse
  • Temperature controlled heating of process chemistries
  • GEM/SECSII Factory Automation Interface
  • Ergonomically mounted 23” Color Touchscreen Monitor with  JST’s GENII Software
  • Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
  • Nitrogen and DI Water Hand Spray Guns
  • Additional facility drain options
  • SEMI S2 Certification
  • CE Marking
  • 3rd Party Electrical Inspections