Horizontal Quartz Diffusion Tube Cleaner Wet Bench
Designed for cleaning of diffusion oven quartz tubes, cassettes, and miscellaneous parts. JST offers a wet bench for cleaning the quartz ware using chemical immersion with rotation in an ultra-clean environment. Rotation of the parts during processing results in uniform cleaning and reduction of chemical usage. The self-monitoring chemical workstation provides accurate process control. As with all JST wet benches, they are designed for ease of maintenance activities and come with our standard 24/7 Technical Support.
Standard Features
- Material Options: FM Approved PVC-C or White Polypropylene
- Internal Stainless Steel frames isolated from process chemistry
- Independent tube, paddle, and miscellaneous part processing baths
- Designed with a programmable logic controller (PLC) in addition to a color touchscreen that control the entire wet bench
- Ergonomically designed front load/unload access for products
- Semi-automated operation platform
- Front removable panels for easy maintenance access
- Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
- Auto-locking process chamber lids
- Robust variable speed rotational tube drive system for uniform chemical cleaning and reduced chemical usage
- Automated chemical handling using an on-board chemical storage reservoir
- Integrated recirculation and filtration of process chemistries
Optional Features
- Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
- Custom part fixtures
- Additional on-board chemical storage reservoirs
- External Chemical Dispense Cart fill and Chemical Waste Pump Cart
- Bulk chemical fill interface
- On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage.
- GEM/SECSII Factory Automation Interface
- Ergonomically mounted 23” Color Touchscreen Monitor with JST’s GENII Software
- Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
- Nitrogen and DI Water Hand Spray Guns
- Additional facility drain options
- SEMI S2 Certification
- CE Marking
- 3rd Party Electrical Inspections
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