Horizontal Quartz Diffusion Tube Cleaner Wet Bench

Designed for cleaning of diffusion oven quartz tubes, cassettes, and miscellaneous parts.  JST offers a wet bench for cleaning the quartz ware using chemical immersion with rotation in an ultra-clean environment.  Rotation of the parts during processing results in uniform cleaning and reduction of chemical usage.  The self-monitoring chemical workstation provides accurate process control.  As with all JST wet benches, they are designed for ease of maintenance activities and come with our standard 24/7 Technical Support.

Standard Features

  • Material Options: FM Approved PVC-C or White Polypropylene
  • Internal Stainless Steel frames isolated from process chemistry
  • Independent tube, paddle, and miscellaneous part processing baths
  • Designed with a programmable logic controller (PLC) in addition to a color touchscreen that control the entire wet bench
  • Ergonomically designed front load/unload access for products
  • Semi-automated operation platform
  • Front removable panels for easy maintenance access
  • Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
  • Auto-locking process chamber lids
  • Robust variable speed rotational tube drive system for uniform chemical cleaning and reduced chemical usage
  • Automated chemical handling using an on-board chemical storage reservoir
  • Integrated recirculation and filtration of process chemistries

Optional Features 

  • Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
  • Custom part fixtures
  • Additional on-board chemical storage reservoirs
  • External Chemical Dispense Cart fill  and Chemical Waste Pump Cart
  • Bulk chemical fill interface
  • On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage.
  • GEM/SECSII Factory Automation Interface
  • Ergonomically mounted 23” Color Touchscreen Monitor with  JST’s GENII Software
  • Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
  • Nitrogen and DI Water Hand Spray Guns
  • Additional facility drain options
  • SEMI S2 Certification
  • CE Marking
  • 3rd Party Electrical Inspections