Pre-Gate and Pre-Metal Clean
Removal of light organics, silicon dioxide layer, particles, and metals.
Process Steps
- STEP 1: HF (50:1) – Constant Temperature Bath
- STEP 2: Rinse – Quick Dump Rinser Bath
- STEP 3: SC2 – Quartz Heated Filtered Bath
- STEP 4: Rinse – Quick Dump Rinser
- STEP 5: Dry – STG Dryer
– OR –
- STEP 1: SC1 – Quartz Heated Filtered Bath *Optional Megasonics
- STEP 2: Rinse – Quick Dump Rinser Bath
- STEP 3: HF (50:1) – Constant Temperature Bath
- STEP 4: Rinse – Quick Dump Rinser
- STEP 5: Dry – STG Dryer
