3-Axis Compact Automated Wet Bench

JST is proud to introduce the (3-Axis) Compact Automated Wet Bench, a compact 3-Axis automated wet bench.  Designed as a low cost automated platform, requiring only the same or smaller footprint as the existing manual wet bench it is designed to replace.  It’s an ideal way of bringing automation into current manual production cleanrooms with space limitations.

The compact size of this platform works well for customers who need accurate repeatable processing results when using the smaller sized GaAs, InP, and other compound semiconductor substrates.  The (3-Axis) Compact automated wet bench safely supports the combination of processing Acids, Bases, and Solvents in the same wet bench. As with all JST wet benches, they are designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.

Standard Features

  • Up to 200mm product size processing capable
  • Material Options:  304L Stainless Steel, 316L Stainless Steel, FM Approved PVC-C, or White Polypropylene
  • Internal stainless steel frames isolated from process chemistry
  • Industry leading compact footprint
  • Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
  • Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
  • Ergonomically mounted 23” Color Touchscreen Monitor, with  JST GENII Software
  • Ergonomically designed front load/unload access for product cassettes
  • Automated, Multi-tasking, or Semi-Automated operation platforms
  • Compact three axis Linear Transfer provides stable high speed product movement
  • Front access maintenance with easy lift-off front roll panel
  • Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
  • Compatible with any JST chemical or rinse process modules

Optional Features 

  • Combination Acid, Base, and Solvent processing in one wet bench
  • Up to 14 Process Modules or baths in one station section
  • Dual Automation platforms for increased throughput
  • Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
  • GEM/SECSII Factory Automation Interface
  • CO2 Fire Suppression System
  • Nitrogen and DI Water Hand Spray Guns
  • On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage
  • Dry to Dry configuration using JST’s IPA Dryers
  • SEMI S2 Certification
  • CE Marking
  • 3rd Party Electrical Inspections

Applications for 3-Axis Compact Automated Wet Bench