Overhead Linear Automated (OLA) Wet Bench
The Overhead Linear Automated (OLA) wet bench platform is the most diverse automated wet bench in the JST product line up. Flexible in its design configuration, the OLA wet bench allows for this chemical wet bench to be customized for larger, heavier, and more awkward materials to be processed with accurate control, high throughput and production flexibility.
The OLA supports semi-automated or automated operation with a variety of integrated wafer input and output requirements. As with all JST wet benches, they are designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.
Standard Features
- Material Options: 304L Stainless Steel, 316L Stainless Steel, FM Approved PVC-C, or White Polypropylene
- Internal Stainless Steel Frames isolated from process chemistry
- Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
- Local data logging of all process parameters and lot tracking stored on the PC’s hard drive.
- Ergonomically mounted 23” Color Touchscreen Monitor, with JST GENII Software
- Adaptable design for front or side load/unload access of product carriers
- Automated, Multi-tasking, or Semi-Automated operation platforms
- Robust Overhead Linear Transfer provide stable high speed product movement
- Front access maintenance with easy lift-off hinged Doors
- Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
- Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
- Compatible with any JST Chemical or Rinse process modules
Optional Features
- GEM/SECSII Factory Automation Interface
- Automated process or transport cassette stocking
- Automated cassette to cassette wafer transfer (transport to process)
- Configurations for both manual operator loading or factory automation with FOUP or SMIF load ports
- Selectable Notch Aligner
- Pre and Post Wafer scanner with Cross Slot Detection and Wafer mismatch alarms
- 3 axis automation capable for reduced footprint
- CO2 Fire Suppression System
- Nitrogen and DI Water Hand Spray Guns
- On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage
- Dry to Dry configuration using JST’s IPA Dryers
- Material transport cart or conveyer integration
- Roll Out process modules for ease of maintenance
- SEMI S2 Certification
- CE Marking
- 3rd Party Electrical Inspections
Applications for Overhead Linear Automated (OLA) Wet Bench
- Pre-Diffusion Clean
- Nitride Etch
- Pre-Gate Clean
- Pre-Metal Clean
- Photoresist Strip, Post Ash Clean, Post Implant Resist Strip, Post Etch Resist Strip (Optional SC1)
- Metal Lift Off
- KOH Etching
- TMAH Etching
- Aqua Regia Etching
- Silicon Wafer Etching
- Lab or fab material cleaning
- HF, DHF, BOE Oxide Etching
- Automated Parts Cleaning System Wet Bench
- Solvent Photo-bowl Cleaner Wet Bench
- Industrial Ultrasonic Cleaner Wet Bench
- Megasonic Cleaner Wet Bench
