Tigress XL Automated Wet Bench
The Tigress XL Automated Wet Bench is another compact, easy to use chemical wet bench from JST’s automation lineup. Designed for applications where 3 process modules are required, the Tigress XL provides advanced automation in a compact footprint at a competitive price. Its unique design isolates the automation from the process area for ultraclean results. This compact wet bench saves on facility cost by reducing floor space and lowering the exhaust requirement providing a lower cost of ownership.
The Tigress XL supports semi-automated, automated, or multi-tasking operation with optional Dry to Dry processing using JST’s Marangoni type STG Combo Rinse Dryer. As with all JST wet benches, they are designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.
Standard Features
- Up to 200mm product size processing capable
- Material Options: 304L Stainless Steel, 316L Stainless Steel, FM Approved PVC-C, or White Polypropylene
- Internal Stainless Steel frames isolated from process chemistry
- Industry Leading compact footprint
- Designed with a programmable logic controller (PLC) in addition to an industrial PC that controls the entire wet bench
- Local data logging of all process parameters and lot tracking stored on the PC’s hard drive
- Ergonomically mounted 23” Color Touchscreen Monitor, with JST GENII Software
- Ergonomically designed front load/unload access for product cassettes
- Automated, Multi-tasking, or Semi-Automated operation platforms
- Compact dual axis Linear Transfer provides stable high speed product movement
- Front access maintenance with easy lift-off front roll panel
- Recessed bath design pulls chemical fumes through the exhausted dual containment plenum
- Compatible with any JST chemical or rinse process modules
Optional Features
- More than 3 modules available based on product size (150mm or smaller)
- Rear access maintenance area provides dual containment for reservoirs, pumps, filters, and plumbing
- GEM/SECSII Factory Automation Interface
- CO2 Fire Suppression System
- Nitrogen and DI Water Hand Spray Guns
- On-board chemical analyzer with integrated concentration control and monitoring for reduced chemical usage
- Dry to Dry configuration using JST’s IPA Dryers
- Active Gripping End Effector for carrier-less processing
- SEMI S2 Certification
- CE Marking
- 3rd Party Electrical Inspections
Applications for Tigress XL Automated Wet Bench
- SC1 Clean
- SC2 Clean
- Nitride Etch
- Pre-Gate Clean
- Pre-Metal Clean
- Photoresist Strip, Post Ash Clean, Post Implant Resist Strip, Post Etch Resist Strip (Optional SC1)
- Metal Lift Off
- KOH Etching
- TMAH Etching
- Aqua Regia Etching
- Silicon Wafer Etching
- Lab or fab material cleaning
- HF, DHF, BOE Oxide Etching
