Vertical Laminar Flow (VLF) Manual Wet Bench

JST’s Vertical Laminar Flow (VLF) chemical bench is an updated style of chemical fumehood designed for manually processing up to 200mm wafers. The unique exhaust design pulls laminar air evenly across the work surface maintaining the same clean laminar air inside the work area as in the clean room. Particles and vapor fumes from the chemistry are pulled away from the operator. The VLF was designed with productivity in mind and meets all SEMI ergonomic requirements allowing the most efficient operator activities for a chemical bench.

As with all JST wet benches, they are designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.

Standard Features

  • Removable Work Surface
  • 304L or 316L Stainless Steel, FM Approved PVC-C, or White Polypropylene materials of construction
  • Purged Electrical Compartments
  • Exhaust Failure Alarm
  • Emergency Power Off
  • Welded Sealed Secondary Containment
  • Seismic Anchors
  • Lockout/Tagout Box
  • Front & Side Safety Shields
  • Compatible with any JST Chemical or Rinse process modules
  • Ergonomic Reach to touchscreen controllers
  • Dedicated Drains

Optional Features Include 

  • Rear Access Compartment
  • Drain to Carboy (reusable or disposable)
  • Onboard Chemical Neutralization
  • HEPA Filtration Module
  • Fire Suppression (CO2 or H2O)
  • Lower Exhausted Storage Compartment
  • SEMI S2 Certification
  • CE Marking
  • 3rd Party Electrical Inspections