JST manufacturing

Process Modules

JST’s Process Baths are designed to be incorporated into JST’s Manual, Fully Automated and Semiautomated Process Stations.

Overflow Serrated EdgeJST’s Overflow Rinse Baths are slotted on all four sidewalls to provide DI water overflow to the plenum.The inside corners are constructed with coved corner design to minimize particle entrapment. A removable slotted dispersion plate sits in the bottom of the tank and provides a laminar fill of the rinse water. The two sided bottom high flow fill provides a sweeping action across the bottom of the bath to abate stagnate water pockets. The fill is regulated with a PVDF flow contol needle valve. The drain function is controlled with a JST Switch Panel Controller and the cascade overflow is time controlled with a JST Timer.

Both natural polypropylene and PVDF construction are available.


JST’s Quick Dump RinseQuick-Dump-Rinser supplies deionized (DI) water from the bottom of the bath through ports that direct the flow up and across the product’s surface. This upward flow lifts the particles and chemicals away from the product and over the four sided overflow weir. After the short overflow cycle, the bottom dump door opens and quickly dumps the rinse water. At the same time, top mounted sprays keep the product wet with fresh, clean DI water during the dumping process. The quick dump rinse is followed by a high flow cascade rinse to ensure all chemical and particulate is removed.

QDR2

A touch screen PLC offers flexibility in creating specific rinsing routines and has the ability to set the number of rinse and dump cycles. Timers are included for programming high flow cascade cycle times. An automatic self-cleaning cycle flushes and purges the quick dump plumbing valves and DI water manifold to eliminate bacterial growth.

For PDF Click Here >> Quick Dump Rinse


Basic Features 

  • Programmable Rinsing Routines
  • Ability to Set the Number of Fill & Dump Cycles
  • Rinse Timer for High Flow Cascading
  • Automatic Self Cleaning Cycles
  • PVDF Construction 

Optional Features 

  • Natural Polypropylene
  • Stainless Steel
  • Resistivity Monitoring
  • DI Water Reclaim
  • Flowmeter for Volume Control
  • Hot DI Water [/one_half_last

Ultrasonic Bath

JST’s ultrasonic baths are designed to make the most of your cleaning chemistry while taking advantage of the cleaning action of the sound waves. Coved corners eliminate particle traps and make tank cleaning easier. JST uses only certified, high performance alloys for maximum strength and long term durability. All standard 316L grade stainless steel tanks are electro polished and have uniform sloped bottoms to ensure complete draining. JST’s tank design eliminates particle buildup and reduces bath cross contamination, making it the ideal choice for critical cleaning of:

• Semiconductors
• Optics
• Disk Drive Components
• Flat Panel Displays
• MEMS and more

Ultrasonic transducer placement and frequency selection are critical for proper cleaning without damaging parts. All frequencies drive the same universal transducer allowing for cleaning different parts within one bath at varying frequencies.

The wafers are then sprayed with a second solvent to make sure all metal stringers that bridge the edge of the photoresist profile to the device are removed. Once this cycle is complete, the wafers are thoroughly rinsed in a clean solvent (IPA or acetone) and then dried in JST’s patented CLV Dryer, eliminating the need for a DI water rinse.

JST’s patented CLV Dryer uses pure, IPA vapor to cleanse the wafers and displace any residual rinse liquid. The dryer then pulls a vacuum to remove the vapors and the tank is backfilled with argon or nitrogen to provide a safe operator environment for wafer removal. A final DI water rinse is available if needed prior to spin drying.

Ultrasonic2
Each heated ultrasonic bath is controlled by a dedicated PLC touch screen controller which uses full PID for temperature control. The controller has the ability to store and execute user defined recipes. Let JST’s application engineers help you optimize your cleaning by matching the right frequency and pattern to your specific cleaning application.


Options Available

• Heating & Control Systems to maintain .5° C.
• Filtration and Recirculation
• Work Baskets
• Mechanical Agitation
• Auto & Manual Lids
• Custom Sizes to Fit Your Product 

Frequencies Available

• 40 kHz
• 72 kHz
• 104 kHz
• 170 kHz 

For PDF Click Here >> Ultrasonic Bath

Quartz Recirculating System for critical cleans and high temperature applications.

Imtec Quartz Meg with wafersJST’s Megasonic Baths provide a high level of cleaning performance by applying high frequency energy (greater than 700 kHz) to effectively remove submicron particles via acoustic cavitation. The high frequency energy and cavitation reduces the boundary layer between the fluid and the surface of the part resulting in fine particle removal. JST’s baths are designed to provide continuous megasonic energy across the full width and depth for continuous full coverage.

Elevated temperature can also help lower the chemistry’s surface tension and further improve substrate cleaning. JST offers ambient static megasonic baths and megasonic Quick Dump Rinsers giving customers the ability to fine tune their processes.


PVDF Megasonic Dump Rinser

• Direct Meg with PFA coated transducers
• Unique wall raising dump design
• rains in

316 Stainless Steel Megasonic

• Direct Meg with 316 stainless steel electropolished transducers

Quartz Megasonic Ambient   and Recirculating

• Direct Meg with PFA coated transducers
• Seamless Corners for Cleanliness

 

Megasonic2

All heated megasonic baths use a touchscreen PLC controller with a full PID Loop for temperature control.

For PDF Click Here >> Megasonic Bath

Utilized for metal lift off and removal of heavy particles that have a tendency to fall to the bottom of the tank.

wafers in tanksm2JST’s heated downflow baths are designed for metal lift off and removal of heavy particles that have a tendency to fall to the bottom of the tank. Filtered and heated solvent chemistry flows directly onto the submersed parts lifting the containminants and flowing them down the bottom of the tank and out the bath drain. This downflow action eliminates the possiblity of sheeting films redepositing back onto the product. In a typical overflow bath, chemistry is introduced into the tank via the bottom and flows over the product and out the top into the overflow weir leaving heavier films to circulate within the body of the bath. With JST’s downflow design the particles are pulled out of the tank and captured in a filter trap.

downflow diagramA 10 inch inline filter housing accepts a standard 10 inch dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry pH and particle removal size required. For applications that require reclaim, a removable filter trap is available.

The heating elements are bonded to the outer walls, insulated and contained with an outer shroud. The heating element in the double wall housing is N2 purged. Inline heaters are recommended for large, high temperature baths that require a fast heat up time or higher processing temperatures.

 

Static heated bath controller (1)

A PID controller using a Type J RTD temperature probe controls the bath temperature. The controller has a programmable temperature and timer. An audio alarm sounds if the bath goes out of the specified operating temperature. In an over temperature condition the controller will turn off the heaters. A heating element snap switch protects an over temperature condition in case the controller or probe fail. A liquid level detection monitors the chemistry level in the bath to keep a safe operating level.

Basic Features 

• Temperature Range 40º C- 120º C /- .5º. Sidewall heaters
• Thermocouple, type J Teflon coated Temperature probe
• Programmable Temperature Controller with Timer
• Liquid Level detection interlocked to pump
• Dual diaphragm pneumatic pump
• Air Operated Drain Valve
• Dispersion cassette platform

Optional Features 

• Hinged or Auto lid
• Dedicated Drain to carboy
• Flow sensor
• Electrical Centrifugal pump
• Auto Chemical fill
• Pump Stroke monitoring
• Temperature Range 40º C- 180º C /- .5º with Inline Heater

For PDF Click Here >> Heated Downflow Bath

 Heated Filtered baths continuously filter process chemicals in a laminar flow direction.

Htd Filter Bath solventJST’s Heated Filtered bath continuously filters process chemicals in a laminar flow direction from the bottom of the bath upward over a four sided weir. The bath is design to filter sub-micron particles and reduce chemical consumption.

A 12 inch inline filter housing accepts a standard 10 inch dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry pH and particle removal size required.Htd Filtered Bath qtz

Baths are available in 316L stainless steel or quartz with serrated overflow edges for uniformity.

The heating elements are bonded to the outer walls, insulated and contained with an outer shroud. The heating element in the double wall housing is N2 purged. Inline heaters are recommended for large, high temperature baths that require a fast heat up time.



Heated Recirc2

Heated Filtered bath continuously filters process chemicals in a laminar flow direction from the bottom of the bath upward over a four sided weir. The bath is design to filter sub-micron particles and reduce chemical consumption.

A 12 inch inline filter housing accepts a standard 10 inch dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry pH and particle removal size required.

Baths are available in 316L stainless steel or quartz with serrated overflow edges for uniformity.

The heating elements are bonded to the outer walls, insulated and contained with an outer shroud. The heating element in the double wall housing is N2 purged. Inline heaters are recommended for large, high temperature baths that require a fast heat up time.


Basic Features 

• Temperature Range 40º C- 120º C /- .5º. Sidewall heaters
• Thermocouple, type J Teflon coated Temperature probe
• Touch Screen PLC Controller
• Liquid Level detection interlocked to pump
• Dual diaphragm pneumatic pump
• Air Operated Drain Valve
• Dispersion cassette platform


Optional Features 

• Hinged or Auto lid
• Dedicated drain to carboy
• Flow sensor
• Electrical Centrifugal pump
• Auto Chemical fill
• Auto Chemical Blending
• Pump Stroke monitoring
• Temperature Range 40º C- 180º C /- .5º with Inline Heater

For PDF Click Here >> Heated Filtered Bath

Maintains accurate temperature control and particle removal.

Constant temp3JST’s Constant Temperature Bath maintains accurate temperature control and particle removal. The recirculated chemistry flow enters the bottom of the process bath, directed in a laminar flow up to a four sided overflow weir then returned back through a pump and filter prior to returning to the process bath.The bath is design to filter sub-micron particles and reduce chemical consumption.

The chemistry temperature is controlled by a remote heat/chiller unit using closed loop coils that transfer and maintain the temperature in the bath.

A Microprocessor PID programmableTemperature Timer controls the process parameters and process times. A RTD probe monitors the process temperature, high and low temperature set points and the alarms. A liquid level monitors detects the liquid level in the tank and has an audio alarm and interlock to shut off the pump at low liquid level.

A 10 inch inline filter housing accepts a standard 10 inch dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry pH and particle removal size required.


Basic Features 

• Temperature Range 10º C- 50º C /- .5º
• Thermocouple, type J Teflon coated Temperature probe
• Programmable Temperature Controller with Timer
• Liquid Level detection interlocked to pump
• Dual diaphragm pneumatic pump
• Air Operated Drain Valve

For PDF Click Here >> Constant Temperature Bath

Optional Features 

• /-0.1º C Solid State Chiller/Heater Unit
• Centrifugal electric pump
• Liquid Level Keep Full
• Auto Chemical Fill
• Auto or manual Lid
• Dual Filter Housings
• Auto Chemical Mixing in the bath

Materials

• Natural Polypropylene
• PVDF
• Teflon
• 316L Stainless Steel

Designed to maintain uniform temperature for processing while meeting NEC and SEMI standards for safety.

Heated static sst1JST’s Static Heated Baths are designed to maintain uniform temperature for processing while meeting NEC and SEMI standards for safety. Quartz and 316L grade stainless steel tanks have the heating element bonded to the outer walls, insulated and contained with an outer shroud. The heating element in the double wall housing is N2 purged and monitored for additional safety for solvent applications. PVDF and Teflon tanks have submersible Teflon coated heaters resting in the bottom of the tank.

Static heated bath controller (1)A proportional controller using a Type J RTD temperature probe controls the bath temperature. The controller has a programmable temperature and timer. An audio alarm sounds if the bath goes out of the specified operating temperature. In an over temperature condition the controller will turn off the heaters. A heating element snap switch protects an over temperature condition in case the controller or probe fails. A liquid level detection monitors the chemistry level in the bath to keep a safe operating level.


Basic Features 

• Temperature Range 40º C- 120º C /- .5º
• Thermocouple, type J Teflon coated Temperature probe
• Programmable Temperature Controller with Timer
• Liquid Level detection
• Semi and NEC compliant
• 1″ Sloped Drain Port
• Dedicated Air Operated Drain Valve

For PDF Click Here >> Static Heated Bath

Optional Features 

• Condensing Cooling Coils
• Liquid Level Keep Full
• Auto Fill
• N2 heater purged monitor interlocked to EPO
• Dedicated drain to carboy or house facility
• Hinged Automated Lid or Manual Lid

Materials

• Quartz
• PVDF
• Teflon
• 316L Stainless Steel

Heated static sst1

Ambient Static Baths incorporate coved corners for cleanliness and a sloped bottom.

JST’s Ambient Static Baths incorporate coved corners for cleanliness and a sloped bottom with 3/4″ port to assure quick and complete draining. Baths are available in electroplished 316L stainless steel, PVDF, PFA (Teflon) and polypropylene. Material selection is based on chemical compatibility and process application.

JST’s process baths are designed to be installed in a JST process shell, either manual or automated. Shell designs available are the EWS, VLF and Fumehood for manual work stations and Linear Transfer or Rotary for automated tools. 


Ambient Static Bath Controller

Controls consist of a microprocessor based stand alone timer that is programmable to count up or down in minutes and seconds. Timer setting is 0-9999 minutes. A programmable Pre Alarm sends an audio warning prior to the timer period being completed. An auto alarm sounds at end of cycle. 


Available Features 

• Manual Lid
• Process Timer
• Air Operated Teflon Drain Valve
• Air Toggle Drain Switch
• Liquid Level Keep Full
• Auto Chemical Fill
• Auto Lid
• Auto Chemical Mixing
• Serrated Overflow Edges

Available Materials

• Natural Polypropylene
• PVDF
• Molded Teflon
• Stainless Steel

For PDF Click Here >> Ambient Static Bath


This bath is designed to filter sub-micron particles and reduce chemical consumption.

Ambient-Filtration-Bath

abient filtered1 


JST’s Ambient Filtration bath continuously filters process chemicals in a laminar flow direction from the bottom of the bath upward over a four sided weir. The bath is designed to filter  sub-micron particles and reduce chemical consumption.

A 12 inch inline filter housing accepts a standard 10 inch dual o-ring filter cartridge allowing users to install the type of filter cartridge they need depending on chemistry pH and particle removal size required.

Available Materials 

• Natural Polypropylene
• PVDF
• Molded Teflon
• 316LStainless Steel

Basic Features 

• Process Timer with end of cycle alarm
• Liquid Level detection interlocked to pump
• Air Operated Drain Valve
• Dispersion Cassette Platform

Optional Features

• Manual, Hinged or Auto lid
• Dedicated drain to acid waste or carboy
• Electrical Centrifugal pump
• Auto Chemical Fill
• Auto Chemical Blending
• Pump Stroke Monitoring

For PDF Click Here >> Ambient Filtered Bath

utility sinkJST’s utility sinks are available in all sizes and materials. Goosenecks can be configured with remote momentary switch, manual valve as shown at right or with a foot pedal control.

Removable lids can be added to increase your workspace when the sink is not in use.


OUR PRODUCTS

JST Manufacturing Inc.
219 E. 50th S.
Boise, ID  83714  USA

Toll Free: 800-872-0391
Phone: 208-377-1120
Fax: 208-377-3645
e-mail: info@jstmfg.com

© 2017 JST Manufacturing© 2017, JST Manufacturing Inc.. All rights reserved.