Surface Tension Gradient Marangoni Dryer
Surface Tension Gradient Marangoni Dryer
JST’s Surface Tension Gradient Marangoni Dryer, is capable of IPA Vapor Drying and DI water Quick-Dump Rinsing (QDR) substrates in a single chamber.
- FM4910 PVC shell and containment
- FM4910 PVDF process chamber
- No IPA vapor present during load/unload
- Ambient IPA vapor generator with low IPA usage
- Ionized N2 to minimize surface charging of product
- Full DI water Quick Dump Rinsing capability
- Designed with a programmable logic controller (PLC) in addition to an industrial color touchscreen
- Modular design for quick replacements and minimal down time
- Automated lid with two hand safety control
- Front and rear access maintenance with lift-off panels
- Recessed dry chamber design pulls chemical fumes through the exhausted dual containment plenum
- Meets NEC, NFPA, and FM codes for processing with flammable solvents (IPA)
- SEMI S2 certification
- CE marked
- PFA Teflon and 316L electropolished stainless steel process chambers
- Flexible dry chamber sizes available
- Facility bulk chemical dispense of IPA
- CO2 fire suppression system
- GEM/SECSII factory automation interface
- 3rd party electrical inspections
- HF, HCL, H2O2, NH4OH, or other chemical injection in the rinse water for surface cleaning/preparation before dry
- Selectable multi-directional drains to divert waste water to different facility locations
- Available as a standalone configuration or integrated into a JST Automated Wet Bench for dry to dry processing
- Silicon wafer
- II-VI compound wafer
- MEMS
- Glass substrates
- Optics and more
Surface Tension Gradient Marangoni Dryer Overview
JST’s Surface Tension Gradient Marangoni Dryer is capable of IPA Vapor Drying and DI water Quick-Dump Rinsing (QDR) substrates in a single chamber. It is available as a standalone system or integrated into a JST Wet Bench.
By making use of the Marangoni Dryer Principle, the STG dryer provides the lowest particle drying of hydrophobic or hydrophilic wafers. At the same time, this system requires the least IPA usage and emissions. This Marangoni Dryer also reduces damage and particles common with spin rinse dry processes, as there are no moving parts present. Since rinsing and drying occur in the same chamber of the STG, this system reduces the overall footprint of the customer’s cleanroom.
The Surface Tension Gradient Dryer (Marangoni Dryer) Dryer has full QDR rinsing capability including top sprays, high flow laminar bottom fill / cascade overflow, and a quick-dump valve for fast draining. Ambient IPA vapor is generated using high purity nitrogen and delivered to the chamber for the drying. In order to provide an inert environment and reduce surface charging of the substrates, programmable Ionized N2 can be introduced for low particle performance. High Purity Heated N2 is used as the final drying step.
Depending on carrier and product type, the STG’s dry cycle typically falls between 10 and 20 minutes. It consumes an average of 7-15 mL IPA consumption per drying cycle. Typical particle performance of < 10 adders @ 0.16um or greater per drying cycle.
Whether performing as a standalone system or a customized wet bench, the Surface Tension Gradient Dryer (Marangoni Dryer) is a highly efficient solution to the solvent-drying process. As with all JST wet benches, JST’s STG Dryer is designed for ease of maintenance activities and comes with our standard 24/7 Technical Support.
